Micro electronic and mechanical systems /
This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconduct...
Gespeichert in:
- 1. Verfasser:
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- Format:
- Elektronisch E-Book
- Sprache:
- Englisch
- Veröffentlicht:
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[Place of publication not identified] :
IntechOpen
2009
InTech, [2009]
- Zusammenfassung:
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This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.
- Umfang:
- 1 online resource (526 pages) : illustrations
- Anmerkungen:
- English
- Bibliografie:
- Includes bibliographical references.
- ISBN:
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9789535158479
9535158473 - Schlagworte:
- Bezugswerke:
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Parallelausgabe: 9789533070278Parallelausgabe: 9533070277
- Links: