Defects in microelectronic materials and devices /

Uncover the Defects that Compromise Performance and ReliabilityAs microelectronics features and devices become smaller and more complex, it is critical that engineers and technologists completely understand how components can be damaged during the increasingly complicated fabrication processes requi...

Ausführliche Beschreibung

Gespeichert in:
1. Verfasser:
Fleetwood, D. M.
Weitere Verfasser:
Pantelides, Sokrates T., Schrimpf, Ronald Donald
Format:
Elektronisch E-Book
Sprache:
Englisch
Veröffentlicht:
Boca Raton, FL : CRC Press, 2008.
Zusammenfassung:
Uncover the Defects that Compromise Performance and ReliabilityAs microelectronics features and devices become smaller and more complex, it is critical that engineers and technologists completely understand how components can be damaged during the increasingly complicated fabrication processes required to produce them.A comprehensive survey of defects that occur in silicon-based metal-oxide semiconductor field-effect transistor (MOSFET) technologies, this book also discusses flaws in linear bipolar technologies, silicon carbide-based devices, and gallium a
Umfang:
1 online resource (772 p.)
Anmerkungen:
Description based upon print version of record.
Anmerkungen:
English
Bibliografie:
Includes bibliographical references and index.
ISBN:
9786611892197
9781040078501
1040078508
9780429190919
0429190913
9781281892195
128189219X
9781420043778
1420043773
Schlagworte:
Microelectronics > Materials > Testing.
Metal oxide semiconductor field-effect transistors > Testing.
Integrated circuits > Defects.
Bezugswerke:
Links: