Microprocesses and nanotechnology 2002 : digest of papers : 2002 International Microprocesses and Nanotechnology Conference : November 6-8, 2002, Tokyo, Japan

Gespeichert in:
1. Verfasser:
Okazaki, Shinji (MitwirkendeR)
Körperschaften:
International Microprocesses and Nanotechnology Conference (Corporate Author), International Microprocesses and Nanotechnology Conference Tokyo, Japan, American Vacuum Society (Content Provider), IEEE Electron Devices Society (Content Provider)
Format:
Tagungsbericht Elektronisch E-Book
Sprache:
Englisch
Veröffentlicht:
[Place of publication not identified] Business Center for Academic Societies Japan 2002
Anmerkungen:
Bibliographic Level Mode of Issuance: Monograph
Anmerkungen:
English
Schlagworte:
Integrated circuits > Design and construction > Very large scale integration > Congresses.
Lithography > Congresses.
Nanotechnology > Congresses.
Microelectronics > Congresses.
Electrical & Computer Engineering
Engineering & Applied Sciences
Electrical Engineering
Bezugswerke: