1996 IEEE International Conference on Microelectronic Test Structures

The papers included in this leading international conference examine test structures for microelectronic devices, their recent progress and future directions. Included is a detailed treatment of current developments in silicon and gallium arsenide microelectronic test structure research, implementat...

Ausführliche Beschreibung

Gespeichert in:
Körperschaft:
IEEE, Electron Devices Society Staff (Corporate Author)
Format:
Elektronisch E-Book
Sprache:
Englisch
Veröffentlicht:
[Place of publication not identified] IEEE 1996
Zusammenfassung:
The papers included in this leading international conference examine test structures for microelectronic devices, their recent progress and future directions. Included is a detailed treatment of current developments in silicon and gallium arsenide microelectronic test structure research, implementation, and applications. Also addressed are advances in device characterization, such as increased miniaturization, reduced operating voltages and reduced power requirements through improved measurement and test techniques. Topics highlighted include: Process Characterization, Dimensional Measurements, Interconnection, SOI & Material Characterization, Reliability, Device Characterization, Capacitance Measurements, Statistics.
Umfang:
1 online resource (338 pages)
Anmerkungen:
Bibliographic Level Mode of Issuance: Monograph
Anmerkungen:
English
Schlagworte:
Integrated circuits > Congresses.
Microelectronics > Congresses.
Bezugswerke: