2001 6th International Symposium on Plasma- and Process-Induced Damage : May 13-15, 2001, Monterey, California, USA

Gespeichert in:
Hauptverfasser:
Engelhardt, Manfred (MitwirkendeR), Gabriel, Calvin T. (MitwirkendeR), Hook, Terence (MitwirkendeR)
Körperschaften:
International Symposium on Plasma Process-Induced Damage (Corporate Author), International Symposium on Plasma Process-Induced Damage Monterey, (Calif.)), IEEE Electron Devices Society (Content Provider), American Vacuum Society (Content Provider)
Format:
Tagungsbericht Elektronisch E-Book
Sprache:
Englisch
Veröffentlicht:
[Place of publication not identified] Northern California Chapter of the American Vacuum Society 2001
Anmerkungen:
Bibliographic Level Mode of Issuance: Monograph
Anmerkungen:
English
Schlagworte:
Semiconductor wafers > Effect of radiation on > Congresses.
Semiconductors > Defects > Congresses.
Plasma radiation > Congresses.
Semiconductors > Congresses.
Electrical & Computer Engineering
Engineering & Applied Sciences
Electrical Engineering
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