Journal of vacuum science and technology. materials, processing, measurement, & phenomena : JVST B. B, Nanotechnology & microelectronics :

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Weitere Titel:
Nanotechnology & microelectronics
Nanotechnology and microelectronics
Journal of vacuum science and technology. B, International journal devoted to microelectronics and nanometer structures : processing, measurement, & phenomena
JVST B
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Körperschaften:
American Vacuum Society, American Institute of Physics
Format:
Elektronisch Zeitschrift
ZDB-Link
Sprache:
Englisch
Veröffentlicht:
New York, NY : AVS through the American Institute of Physics
Erscheinungsjahr:
Began with 2nd ser., v. 28, no. 2 (Mar./Apr. 2010).
Anmerkungen:
Refereed/Peer-reviewed
Erscheinungs­häufigkeit:
Bimonthly
ISSN:
2166-2754
1520-8567
2166-2746
Related Item Notes:
Schlagworte:
Nanotechnology > Periodicals.
Microelectronics > Periodicals.
Microelectronics.
Nanotechnology.
Periodicals.
Bezugswerke:
Links: