Introduction to focused ion beam nanometrology /

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This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instrum...

Ausführliche Beschreibung

Gespeichert in:
Weitere Titel:
IOP concise physics,
1. Verfasser:
Cox, David C.
Format:
Elektronisch E-Book
Sprache:
Englisch
Veröffentlicht:
San Rafael [California] (40 Oak Drive, San Rafael, CA, 94903, USA) : Morgan & Claypool Publishers, [2015]
Zusammenfassung:
This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instruments including the new addition to the field of plasma-based sources, it then gives an overview of ion solid interactions and how the different types of instrument can be applied. Chapters then describe how these machines can be applied to the field of materials science and device fabrication giving examples of recent and current activity in both these areas.
Umfang:
1 online resource (various pagings) : illustrations (some color).
Also available in print.
Mode of access: World Wide Web.
System requirements: Adobe Acrobat Reader.
Anmerkungen:
"Version: 20151001"--Title page verso.
"A Morgan & Claypool publication as part of IOP Concise Physics"--Title page verso.
Format Details:
Mode of access: World Wide Web.
System requirements: Adobe Acrobat Reader.
Zielpublikum:
This book will appeal in the first instance to university academics post-doctoral researchers and post- graduate students or advanced undergraduates. Beyond this, many industries where materials properties are required and in particular, where material is limited, for example anyone that processes thin films and coatings.
Bibliografie:
Includes bibliographical references.
ISBN:
9781681740843
9781681741482
1681741482
ISSN:
2053-2571
Schlagworte:
Nanostructured materials > Measurement.
Engineering Measurement and calibration.
TECHNOLOGY & ENGINEERING / Measurement.
Bezugswerke:
Links: