IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.

Gespeichert in:
Weitere Titel:
IEEE transactions on semiconductor manufacturing (Online)
Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturing
Transactions on semiconductor manufacturing
Semiconductor manufacturing
Körperschaften:
IEEE Components, Hybrids, and Manufacturing Technology Society, IEEE Electron Devices Society, IEEE Reliability Society, IEEE Solid-State Circuits Council, Institute of Electrical and Electronics Engineers
Format:
Elektronisch Zeitschrift
Sprache:
Englisch
Veröffentlicht:
New York, N.Y. : Institute of Electrical and Electronics Engineers
Erscheinungsjahr:
Print began with v. 1, no. 1 (Feb. 1988).
Umfang:
Also issued in print.
Mode of access: World Wide Web.
Anmerkungen:
Refereed/Peer-reviewed
Erscheinungs­häufigkeit:
Quarterly
Format Details:
Mode of access: World Wide Web.
ISSN:
1558-2345
0894-6507
Schlagworte:
Links: