Handbook of silicon based MEMS materials and technologies /

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS materialMaterial properties and measurement techniquesAnalytical methods used in mat...

Ausführliche Beschreibung

Gespeichert in:
1. Verfasser:
Lindroos, Veikko.
Weitere Verfasser:
Lindroos, Veikko
Format:
Elektronisch E-Book
Sprache:
Englisch
Veröffentlicht:
Amsterdam ; Boston : William Andrew/Elsevier, 2010.
Ausgabe:
1st ed.
Zusammenfassung:
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS materialMaterial properties and measurement techniquesAnalytical methods used in materials characterizationModeling in MEMSMeasuring MEMSMicromachining technologies in MEMSEncapsulation of MEMS componentsEmerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well
Umfang:
1 online resource (669 p.)
text file
Anmerkungen:
Description based upon print version of record.
Anmerkungen:
English
Bibliografie:
Includes bibliographical references and index.
ISBN:
9786612541148
9780815519881
0815519885
9780080947723
0080947727
9781282541146
1282541145
Schlagworte:
Microelectromechanical systems.
Microelectromechanical systems > Materials.
Silicon > Electric properties.
Bezugswerke:
Links: