Developments in surface contamination and cleaning. cleanliness validation and verification / Volume 7 :

As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning...

Ausführliche Beschreibung

Gespeichert in:
1. Verfasser:
Kohli, Rajiv (HerausgeberIn)
Weitere Verfasser:
Mittal, K. L. (HerausgeberIn), Albert, David E. (MitwirkendeR)
Format:
Elektronisch E-Book
Sprache:
Englisch
Veröffentlicht:
Kidlington, England ; Waltham, Massachusetts : William Andrew, 2015.
Ausgabe:
First edition.
Zusammenfassung:
As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. The chapters i
Umfang:
1 online resource (207 p.)
text file
Anmerkungen:
Description based upon print version of record.
Anmerkungen:
English
Bibliografie:
Includes bibliographical references at the end of each chapters and index.
ISBN:
0-323-31145-8
Schlagworte:
Surfaces (Technology)
Surface contamination > Prevention.
Bezugswerke:
Links: