Perspectives on the limits of fabrication and measurement selected papers from the NATO Advanced Research Workshop on 'The Ultimate Limits of Fabrication and Measurement' ... in April 1994 at the Moller Centre of Churchill College in Cambridge, England ...
Gespeichert in:
- Weitere Titel:
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Nanotips and nanosources
Fabrication limits of electron beam lithography and of UV, X-ray and ion beam lithographies - Hauptverfasser:
- ,
- Weitere Verfasser:
- Format:
- Tagungsbericht Buch
- Sprache:
- Englisch
- Veröffentlicht:
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London
Royal Society
1995
- Bestände:
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Außenmagazin: natz.p100(353)
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- Umfang:
- S. 279 - 393 : Ill., graph. Darst.
- Anmerkungen:
- Enth. u.a.: Nanotips and nanosources / V. T. Binh, N. Garcia and V. Semet. Fabrication limits of electron beam lithography and of UV, X-ray and ion-beam lithographies / A. N. Broers
- Schriftenreihe:
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Philosophical transactions : Series A, Physical sciences and engineering
; 1703 : Vol. 353