Cooper, C. B. (1991). Proceedings of the Workshop on High-Sensity Plasma Techniques and Processes for Integrated Circuit Fabrication: 11-12 September 1990, Burlingame, California. AVS.
Chicago-Zitierstil (17. Ausg.)Cooper, C. B. Proceedings of the Workshop on High-Sensity Plasma Techniques and Processes for Integrated Circuit Fabrication: 11-12 September 1990, Burlingame, California. New York: AVS, 1991.
MLA-Zitierstil (8. Ausg.)Cooper, C. B. Proceedings of the Workshop on High-Sensity Plasma Techniques and Processes for Integrated Circuit Fabrication: 11-12 September 1990, Burlingame, California. AVS, 1991.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.